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Mechanical Response of MEMS Inductor with Auxiliary Pillar under High-g Shock
Micro-electromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance, but poor mechanical properties. To improve their reliability, auxiliary pillars have been used. However, few studies have been carried out on the response of a suspended inductor with auxiliary...
Autores principales: | Xu, Lixin, Li, Yiyuan, Li, Jianhua, Lu, Chongying |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187739/ https://www.ncbi.nlm.nih.gov/pubmed/30424109 http://dx.doi.org/10.3390/mi9040176 |
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