Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators

This paper demonstrates the four fold enhancement in quality factor (Q) of a very high frequency (VHF) band piezoelectric Aluminum Nitride (AlN) on Silicon (Si) Lamb mode resonator by applying a unique wide acoustic bandgap (ABG) phononic crystal (PnC) at the anchoring boundaries of the resonator. T...

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Detalles Bibliográficos
Autores principales: Siddiqi, Muhammad Wajih Ullah, Lee, Joshua E.-Y.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187823/
https://www.ncbi.nlm.nih.gov/pubmed/30424346
http://dx.doi.org/10.3390/mi9080413

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187823/
https://www.ncbi.nlm.nih.gov/pubmed/30424346
http://dx.doi.org/10.3390/mi9080413

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