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Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators

This paper demonstrates the four fold enhancement in quality factor (Q) of a very high frequency (VHF) band piezoelectric Aluminum Nitride (AlN) on Silicon (Si) Lamb mode resonator by applying a unique wide acoustic bandgap (ABG) phononic crystal (PnC) at the anchoring boundaries of the resonator. T...

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Detalles Bibliográficos
Autores principales:	Siddiqi, Muhammad Wajih Ullah, Lee, Joshua E.-Y.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187823/ https://www.ncbi.nlm.nih.gov/pubmed/30424346 http://dx.doi.org/10.3390/mi9080413

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