Chemical Mechanical Planarization and Old Italian Violins

Previous studies have shown that spectral analysis based on force data can elucidate fundamental physical phenomena during chemical mechanical planarization (CMP). While it has not been literally described elsewhere, such analysis was partly motivated by modern violinmakers and physicists studying O...

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Detalles Bibliográficos
Autores principales: Philipossian, Ara, Sampurno, Yasa, Peckler, Lauren
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187829/
https://www.ncbi.nlm.nih.gov/pubmed/30393312
http://dx.doi.org/10.3390/mi9010037

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187829/
https://www.ncbi.nlm.nih.gov/pubmed/30393312
http://dx.doi.org/10.3390/mi9010037

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