Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters

Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP(®) actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their thermal expansions....

Descripción completa

Detalles Bibliográficos
Autores principales: Guo, Jianbin, Wang, Jinling, Zeng, Shengkui, Silberschmidt, Vadim V., Shen, Yongguang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187910/
https://www.ncbi.nlm.nih.gov/pubmed/30400537
http://dx.doi.org/10.3390/mi8120348

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187910/
https://www.ncbi.nlm.nih.gov/pubmed/30400537
http://dx.doi.org/10.3390/mi8120348

Ejemplares similares