Investigation of Antireflection Nb(2)O(5) Thin Films by the Sputtering Method under Different Deposition Parameters

In this study, Nb(2)O(5) ceramic was used as the target to deposit the Nb(2)O(5) thin films on glass substrates with the radio frequency (RF) magnetron sputtering method. Different deposition temperatures and O(2) ratios were used as parameters to investigate the optical properties of Nb(2)O(5) thin...

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Detalles Bibliográficos
Autores principales: Chen, Kun-Neng, Hsu, Chao-Ming, Liu, Jing, Liou, Yu-Chen, Yang, Cheng-Fu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189702/
https://www.ncbi.nlm.nih.gov/pubmed/30404326
http://dx.doi.org/10.3390/mi7090151

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189702/
https://www.ncbi.nlm.nih.gov/pubmed/30404326
http://dx.doi.org/10.3390/mi7090151

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