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Investigation of Antireflection Nb(2)O(5) Thin Films by the Sputtering Method under Different Deposition Parameters
In this study, Nb(2)O(5) ceramic was used as the target to deposit the Nb(2)O(5) thin films on glass substrates with the radio frequency (RF) magnetron sputtering method. Different deposition temperatures and O(2) ratios were used as parameters to investigate the optical properties of Nb(2)O(5) thin...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189702/ https://www.ncbi.nlm.nih.gov/pubmed/30404326 http://dx.doi.org/10.3390/mi7090151 |