A New XYZ Compliant Parallel Mechanism for Micro-/Nano-Manipulation: Design and Analysis

Based on the constraint and position identification (CPI) approach for synthesizing XYZ compliant parallel mechanisms (CPMs) and configuration modifications, this paper proposes a new fully-symmetrical XYZ CPM with desired motion characteristics such as reduced cross-axis coupling, minimized lost motion, and relatively small parasitic motion. The good motion characteristics arise from not only its symmetric configuration, but also the rigid linkages between non-adjacent rigid stages. Comprehensive kinematic analysis is carried out based on a series of finite element simulations over a motion range per axis less than ±5% of the beam length, which reveals that the maximum cross-axis coupling rate is less than 0.86%, the maximum lost motion rate is less than 1.20%, the parasitic rotations of the motion stage (MS) are in the order of 10(−5) rad, and the parasitic translations of the three actuated stages (ASs) are in the order of 10(−4) of the beam length (less than 0.3% of the motion range), where the beam slenderness ratio is larger than 20. Furthermore, the nonlinear analytical models of the primary translations of the XYZ CPM, including the primary translations of the MS and the ASs, are derived and validated to provide a quick design synthesis. Moreover, two practical design schemes of the proposed XYZ CPM are discussed with consideration of the manufacturability. The practical designs enable the XYZ CPM to be employed in many applications such as micro-/nano-positioning, micro-/nano-manufacturing and micro-/nano-assembly. Finally, a spatial high-precision translational system is presented based on the practical design schemes, taking the actuator and sensor integration into account.