Stencil Lithography for Scalable Micro- and Nanomanufacturing

In this paper, we review the current development of stencil lithography for scalable micro- and nanomanufacturing as a resistless and reusable patterning technique. We first introduce the motivation and advantages of stencil lithography for large-area micro- and nanopatterning. Then we review the pr...

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Detalles Bibliográficos
Autores principales: Du, Ke, Ding, Junjun, Liu, Yuyang, Wathuthanthri, Ishan, Choi, Chang-Hwan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189734/
http://dx.doi.org/10.3390/mi8040131

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189734/
http://dx.doi.org/10.3390/mi8040131

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