Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

We introduce a non-lithographical and vacuum-free method to pattern silicon. The method combines inkjet printing and metal assisted chemical etching (MaCE); we call this method “INKMAC”. A commercial silver ink is printed on top of a silicon surface to create the catalytic patterns for MaCE. The MaC...

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Detalles Bibliográficos
Autores principales: Hoshian, Sasha, Gaspar, Cristina, Vasara, Teemu, Jahangiri, Farzin, Jokinen, Ville, Franssila, Sami
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189811/
https://www.ncbi.nlm.nih.gov/pubmed/30404394
http://dx.doi.org/10.3390/mi7120222

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189811/
https://www.ncbi.nlm.nih.gov/pubmed/30404394
http://dx.doi.org/10.3390/mi7120222

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