Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors

In order to meet the requirement of high sensitivity and signal-to-noise ratios (SNR), this study develops and optimizes a piezoresistive pressure sensor by using double silicon nanowire (SiNW) as the piezoresistive sensing element. First of all, ANSYS finite element method and voltage noise models...

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Detalles Bibliográficos
Autores principales: Zhang, Jiahong, Zhao, Yang, Ge, Yixian, Li, Min, Yang, Lijuan, Mao, Xiaoli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189815/
https://www.ncbi.nlm.nih.gov/pubmed/30404360
http://dx.doi.org/10.3390/mi7100187

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189815/
https://www.ncbi.nlm.nih.gov/pubmed/30404360
http://dx.doi.org/10.3390/mi7100187

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