Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode

This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron beam lithography, photolithography, deep reactive ion...

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Detalles Bibliográficos
Autores principales: Toan, Nguyen Van, Shimazaki, Tsuyoshi, Inomata, Naoki, Song, Yunheub, Ono, Takahito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189819/
https://www.ncbi.nlm.nih.gov/pubmed/30400502
http://dx.doi.org/10.3390/mi8100312

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189819/
https://www.ncbi.nlm.nih.gov/pubmed/30400502
http://dx.doi.org/10.3390/mi8100312

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