Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption

Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling...

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Detalles Bibliográficos
Autores principales: Lara-Castro, Miguel, Herrera-Amaya, Adrian, Escarola-Rosas, Marco A., Vázquez-Toledo, Moisés, López-Huerta, Francisco, Aguilera-Cortés, Luz A., Herrera-May, Agustín L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189825/
https://www.ncbi.nlm.nih.gov/pubmed/30400394
http://dx.doi.org/10.3390/mi8070203

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189825/
https://www.ncbi.nlm.nih.gov/pubmed/30400394
http://dx.doi.org/10.3390/mi8070203

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