Cargando…

Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption

Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling...

Descripción completa

Detalles Bibliográficos
Autores principales: Lara-Castro, Miguel, Herrera-Amaya, Adrian, Escarola-Rosas, Marco A., Vázquez-Toledo, Moisés, López-Huerta, Francisco, Aguilera-Cortés, Luz A., Herrera-May, Agustín L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189825/
https://www.ncbi.nlm.nih.gov/pubmed/30400394
http://dx.doi.org/10.3390/mi8070203

Ejemplares similares