PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning

This article presents design, fabrication and characterization of lead zirconate titanate (PZT)-actuated micromirrors, which enable extremely large scan angle of up to 106° and high frequency of 45 kHz simultaneously. Besides the high driving torque delivered by PZT actuators, mechanical leverage am...

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Detalles Bibliográficos
Autores principales: Gu-Stoppel, Shanshan, Giese, Thorsten, Quenzer, Hans-Joachim, Hofmann, Ulrich, Benecke, Wolfgang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189852/
https://www.ncbi.nlm.nih.gov/pubmed/30400406
http://dx.doi.org/10.3390/mi8070215

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189852/
https://www.ncbi.nlm.nih.gov/pubmed/30400406
http://dx.doi.org/10.3390/mi8070215

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