Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybr...

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Detalles Bibliográficos
Autores principales: Valadeiro, João, Cardoso, Susana, Macedo, Rita, Guedes, Andre, Gaspar, João, Freitas, Paulo P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189911/
https://www.ncbi.nlm.nih.gov/pubmed/30404264
http://dx.doi.org/10.3390/mi7050088

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189911/
https://www.ncbi.nlm.nih.gov/pubmed/30404264
http://dx.doi.org/10.3390/mi7050088

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