A New Method of Fixing High-Aspect-Ratio Microstructures by Gel

In the microfabrication processes, it is necessary to examine the quality of the structures to ensure the whole process runs smoothly. However, the examination process of pattern defects is interrupted during the fabrication of high-aspect-ratio microstructures. The inevitable pattern defects arise...

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Detalles Bibliográficos
Autores principales: Chen, Nan, Chen, Xiangyu, Xiong, Penghui, Hou, Shuangyue, Zhang, Xiaobo, Xiong, Ying, Liu, Gang, Tian, Yangchao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189917/
https://www.ncbi.nlm.nih.gov/pubmed/30404288
http://dx.doi.org/10.3390/mi7070115

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189917/
https://www.ncbi.nlm.nih.gov/pubmed/30404288
http://dx.doi.org/10.3390/mi7070115

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