The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

A high Q factor film bulk acoustic resonator operating in thickness shear mode excited by a lateral field is described in this paper. The influence of electrode parameters on the resonator performance is studied by the finite element method. The results showed that three key electrode parameters, in...

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Detalles Bibliográficos
Autores principales: Chen, Da, Ren, Wenwen, Song, Shuren, Wang, Jingjing, Liu, Weihui, Wang, Peng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189929/
https://www.ncbi.nlm.nih.gov/pubmed/30404404
http://dx.doi.org/10.3390/mi7120231

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189929/
https://www.ncbi.nlm.nih.gov/pubmed/30404404
http://dx.doi.org/10.3390/mi7120231

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