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The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

A high Q factor film bulk acoustic resonator operating in thickness shear mode excited by a lateral field is described in this paper. The influence of electrode parameters on the resonator performance is studied by the finite element method. The results showed that three key electrode parameters, in...

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Detalles Bibliográficos
Autores principales: Chen, Da, Ren, Wenwen, Song, Shuren, Wang, Jingjing, Liu, Weihui, Wang, Peng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189929/
https://www.ncbi.nlm.nih.gov/pubmed/30404404
http://dx.doi.org/10.3390/mi7120231
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author Chen, Da
Ren, Wenwen
Song, Shuren
Wang, Jingjing
Liu, Weihui
Wang, Peng
author_facet Chen, Da
Ren, Wenwen
Song, Shuren
Wang, Jingjing
Liu, Weihui
Wang, Peng
author_sort Chen, Da
collection PubMed
description A high Q factor film bulk acoustic resonator operating in thickness shear mode excited by a lateral field is described in this paper. The influence of electrode parameters on the resonator performance is studied by the finite element method. The results showed that three key electrode parameters, including the gap, length and width, played important roles in the optimization of the resonator performance. The highest Q factor of up to 643 was obtained when the parallel electrodes were designed to be 100 µm × 10 µm with the electrode gap of 10 µm. Based on the simulation results, the AlN-based film bulk acoustic resonator with a solidly mounted structure was fabricated. The testing results showed that the real device operated at the resonance frequency of 1.94 GHz with the Q factor of 405 in air, 216 in water and 102 in phosphate buffered saline solution.
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spelling pubmed-61899292018-11-01 The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid Chen, Da Ren, Wenwen Song, Shuren Wang, Jingjing Liu, Weihui Wang, Peng Micromachines (Basel) Article A high Q factor film bulk acoustic resonator operating in thickness shear mode excited by a lateral field is described in this paper. The influence of electrode parameters on the resonator performance is studied by the finite element method. The results showed that three key electrode parameters, including the gap, length and width, played important roles in the optimization of the resonator performance. The highest Q factor of up to 643 was obtained when the parallel electrodes were designed to be 100 µm × 10 µm with the electrode gap of 10 µm. Based on the simulation results, the AlN-based film bulk acoustic resonator with a solidly mounted structure was fabricated. The testing results showed that the real device operated at the resonance frequency of 1.94 GHz with the Q factor of 405 in air, 216 in water and 102 in phosphate buffered saline solution. MDPI 2016-12-14 /pmc/articles/PMC6189929/ /pubmed/30404404 http://dx.doi.org/10.3390/mi7120231 Text en © 2016 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Chen, Da
Ren, Wenwen
Song, Shuren
Wang, Jingjing
Liu, Weihui
Wang, Peng
The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
title The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
title_full The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
title_fullStr The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
title_full_unstemmed The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
title_short The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
title_sort high q factor lateral field–excited thickness shear mode film bulk acoustic resonator working in liquid
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189929/
https://www.ncbi.nlm.nih.gov/pubmed/30404404
http://dx.doi.org/10.3390/mi7120231
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