Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors

Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, an electrothermal bimorph MEMS mirror that does not...

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Detalles Bibliográficos
Autores principales: Li, Mengyuan, Chen, Qiao, Liu, Yabing, Ding, Yingtao, Xie, Huikai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189931/
https://www.ncbi.nlm.nih.gov/pubmed/30400479
http://dx.doi.org/10.3390/mi8100289

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189931/
https://www.ncbi.nlm.nih.gov/pubmed/30400479
http://dx.doi.org/10.3390/mi8100289

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