Cargando…

CMOS MEMS Fabrication Technologies and Devices

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements,...

Descripción completa

Detalles Bibliográficos
Autor principal: Qu, Hongwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189935/
https://www.ncbi.nlm.nih.gov/pubmed/30407387
http://dx.doi.org/10.3390/mi7010014