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CMOS MEMS Fabrication Technologies and Devices
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements,...
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Formato: | Online Artículo Texto |
Lenguaje: | English |
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MDPI
2016
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189935/ https://www.ncbi.nlm.nih.gov/pubmed/30407387 http://dx.doi.org/10.3390/mi7010014 |