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CMOS MEMS Fabrication Technologies and Devices

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements,...

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Detalles Bibliográficos
Autor principal:	Qu, Hongwei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189935/ https://www.ncbi.nlm.nih.gov/pubmed/30407387 http://dx.doi.org/10.3390/mi7010014

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