Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method

Single-crystal silicon microlens arrays are increasingly required in advanced infrared optics. In this study, the authors attempted to fabricate hexagonal microlens arrays, which offer high optical efficiency, on a single-crystal silicon wafer using diamond turning. A tool-servo driven segment turni...

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Detalles Bibliográficos
Autores principales: Mukaida, Mao, Yan, Jiwang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189949/
https://www.ncbi.nlm.nih.gov/pubmed/30400513
http://dx.doi.org/10.3390/mi8110323

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189949/
https://www.ncbi.nlm.nih.gov/pubmed/30400513
http://dx.doi.org/10.3390/mi8110323

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