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Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method

Single-crystal silicon microlens arrays are increasingly required in advanced infrared optics. In this study, the authors attempted to fabricate hexagonal microlens arrays, which offer high optical efficiency, on a single-crystal silicon wafer using diamond turning. A tool-servo driven segment turni...

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Detalles Bibliográficos
Autores principales: Mukaida, Mao, Yan, Jiwang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189949/
https://www.ncbi.nlm.nih.gov/pubmed/30400513
http://dx.doi.org/10.3390/mi8110323
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author Mukaida, Mao
Yan, Jiwang
author_facet Mukaida, Mao
Yan, Jiwang
author_sort Mukaida, Mao
collection PubMed
description Single-crystal silicon microlens arrays are increasingly required in advanced infrared optics. In this study, the authors attempted to fabricate hexagonal microlens arrays, which offer high optical efficiency, on a single-crystal silicon wafer using diamond turning. A tool-servo driven segment turning method was proposed to reduce the dynamic error of the machine tool induced by lenslet edges during lens array cutting. From the results of both cutting experiments and theoretical analysis of the machine tool dynamic error, it was demonstrated that the segment turning method reduced significantly the dynamic errors and led to high form accuracy. As a result, sharp edges among the lenslets were generated precisely and microlens arrays with a form error of ~300 nm peak-to-valley and surface roughness of ~5 nmSa, which meets the requirements of infrared optical systems, were successfully fabricated. The subsurface damage, such as the amorphization of silicon, caused by machining was also reduced.
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spelling pubmed-61899492018-11-01 Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method Mukaida, Mao Yan, Jiwang Micromachines (Basel) Article Single-crystal silicon microlens arrays are increasingly required in advanced infrared optics. In this study, the authors attempted to fabricate hexagonal microlens arrays, which offer high optical efficiency, on a single-crystal silicon wafer using diamond turning. A tool-servo driven segment turning method was proposed to reduce the dynamic error of the machine tool induced by lenslet edges during lens array cutting. From the results of both cutting experiments and theoretical analysis of the machine tool dynamic error, it was demonstrated that the segment turning method reduced significantly the dynamic errors and led to high form accuracy. As a result, sharp edges among the lenslets were generated precisely and microlens arrays with a form error of ~300 nm peak-to-valley and surface roughness of ~5 nmSa, which meets the requirements of infrared optical systems, were successfully fabricated. The subsurface damage, such as the amorphization of silicon, caused by machining was also reduced. MDPI 2017-10-30 /pmc/articles/PMC6189949/ /pubmed/30400513 http://dx.doi.org/10.3390/mi8110323 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Mukaida, Mao
Yan, Jiwang
Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
title Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
title_full Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
title_fullStr Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
title_full_unstemmed Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
title_short Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
title_sort fabrication of hexagonal microlens arrays on single-crystal silicon using the tool-servo driven segment turning method
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189949/
https://www.ncbi.nlm.nih.gov/pubmed/30400513
http://dx.doi.org/10.3390/mi8110323
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