Cargando…
Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method
Single-crystal silicon microlens arrays are increasingly required in advanced infrared optics. In this study, the authors attempted to fabricate hexagonal microlens arrays, which offer high optical efficiency, on a single-crystal silicon wafer using diamond turning. A tool-servo driven segment turni...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6189949/ https://www.ncbi.nlm.nih.gov/pubmed/30400513 http://dx.doi.org/10.3390/mi8110323 |