A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines

In this paper, a beam-membrane (BM) sensor for measuring friction torque in micro-electro-mechanical system (MEMS) gas bearings is presented. The proposed sensor measures the force-arm-transformed force using a detecting probe and the piezoresistive effect. This solution incorporates a membrane into...

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Detalles Bibliográficos
Autores principales: Liu, Huan, Yu, Zhongliang, Liu, Yan, Fang, Xudong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190009/
https://www.ncbi.nlm.nih.gov/pubmed/30400495
http://dx.doi.org/10.3390/mi8100304

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190009/
https://www.ncbi.nlm.nih.gov/pubmed/30400495
http://dx.doi.org/10.3390/mi8100304

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