Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching

Maskless etching approaches such as microdischarges and atmospheric pressure plasma jets (APPJs) have been studied recently. Nonetheless, a simple, long lifetime, and efficient maskless etching method is still a challenge. In this work, a separated type maskless etching system based on atmospheric p...

Descripción completa

Detalles Bibliográficos
Autores principales: Dai, Yichuan, Zhang, Man, Li, Qiang, Wen, Li, Wang, Hai, Chu, Jiaru
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190014/
http://dx.doi.org/10.3390/mi8060173

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190014/
http://dx.doi.org/10.3390/mi8060173

Ejemplares similares