Cargando…

Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching

Maskless etching approaches such as microdischarges and atmospheric pressure plasma jets (APPJs) have been studied recently. Nonetheless, a simple, long lifetime, and efficient maskless etching method is still a challenge. In this work, a separated type maskless etching system based on atmospheric p...

Descripción completa

Detalles Bibliográficos
Autores principales: Dai, Yichuan, Zhang, Man, Li, Qiang, Wen, Li, Wang, Hai, Chu, Jiaru
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190014/
http://dx.doi.org/10.3390/mi8060173
_version_ 1783363479459069952
author Dai, Yichuan
Zhang, Man
Li, Qiang
Wen, Li
Wang, Hai
Chu, Jiaru
author_facet Dai, Yichuan
Zhang, Man
Li, Qiang
Wen, Li
Wang, Hai
Chu, Jiaru
author_sort Dai, Yichuan
collection PubMed
description Maskless etching approaches such as microdischarges and atmospheric pressure plasma jets (APPJs) have been studied recently. Nonetheless, a simple, long lifetime, and efficient maskless etching method is still a challenge. In this work, a separated type maskless etching system based on atmospheric pressure He/O(2) plasma jet and microfabricated Micro Electro Mechanical Systems (MEMS) nozzle have been developed with advantages of simple-structure, flexibility, and parallel processing capacity. The plasma was generated in the glass tube, forming the micron level plasma jet between the nozzle and the surface of polymer. The plasma microjet was capable of removing photoresist without masks since it contains oxygen reactive species verified by spectra measurement. The experimental results illustrated that different features of microholes etched by plasma microjet could be achieved by controlling the distance between the nozzle and the substrate, additive oxygen ratio, and etch time, the result of which is consistent with the analysis result of plasma spectra. In addition, a parallel etching process was also realized by plasma microjets array.
format Online
Article
Text
id pubmed-6190014
institution National Center for Biotechnology Information
language English
publishDate 2017
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-61900142018-11-01 Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching Dai, Yichuan Zhang, Man Li, Qiang Wen, Li Wang, Hai Chu, Jiaru Micromachines (Basel) Article Maskless etching approaches such as microdischarges and atmospheric pressure plasma jets (APPJs) have been studied recently. Nonetheless, a simple, long lifetime, and efficient maskless etching method is still a challenge. In this work, a separated type maskless etching system based on atmospheric pressure He/O(2) plasma jet and microfabricated Micro Electro Mechanical Systems (MEMS) nozzle have been developed with advantages of simple-structure, flexibility, and parallel processing capacity. The plasma was generated in the glass tube, forming the micron level plasma jet between the nozzle and the surface of polymer. The plasma microjet was capable of removing photoresist without masks since it contains oxygen reactive species verified by spectra measurement. The experimental results illustrated that different features of microholes etched by plasma microjet could be achieved by controlling the distance between the nozzle and the substrate, additive oxygen ratio, and etch time, the result of which is consistent with the analysis result of plasma spectra. In addition, a parallel etching process was also realized by plasma microjets array. MDPI 2017-06-01 /pmc/articles/PMC6190014/ http://dx.doi.org/10.3390/mi8060173 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Dai, Yichuan
Zhang, Man
Li, Qiang
Wen, Li
Wang, Hai
Chu, Jiaru
Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
title Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
title_full Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
title_fullStr Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
title_full_unstemmed Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
title_short Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
title_sort separated type atmospheric pressure plasma microjets array for maskless microscale etching
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190014/
http://dx.doi.org/10.3390/mi8060173
work_keys_str_mv AT daiyichuan separatedtypeatmosphericpressureplasmamicrojetsarrayformasklessmicroscaleetching
AT zhangman separatedtypeatmosphericpressureplasmamicrojetsarrayformasklessmicroscaleetching
AT liqiang separatedtypeatmosphericpressureplasmamicrojetsarrayformasklessmicroscaleetching
AT wenli separatedtypeatmosphericpressureplasmamicrojetsarrayformasklessmicroscaleetching
AT wanghai separatedtypeatmosphericpressureplasmamicrojetsarrayformasklessmicroscaleetching
AT chujiaru separatedtypeatmosphericpressureplasmamicrojetsarrayformasklessmicroscaleetching