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Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching

Maskless etching approaches such as microdischarges and atmospheric pressure plasma jets (APPJs) have been studied recently. Nonetheless, a simple, long lifetime, and efficient maskless etching method is still a challenge. In this work, a separated type maskless etching system based on atmospheric p...

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Detalles Bibliográficos
Autores principales:	Dai, Yichuan, Zhang, Man, Li, Qiang, Wen, Li, Wang, Hai, Chu, Jiaru
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190014/ http://dx.doi.org/10.3390/mi8060173

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