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A Micro-Test Structure for the Thermal Expansion Coefficient of Metal Materials

An innovative micro-test structure for detecting the thermal expansion coefficient (TEC) of metal materials is presented in this work. Throughout this method, a whole temperature sensing moveable structures are supported by four groups of cascaded chevrons beams and packed together. Thermal expansio...

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Detalles Bibliográficos
Autores principales: Ren, Qingying, Wang, Lifeng, Huang, Qingan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190033/
http://dx.doi.org/10.3390/mi8030070