Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation

We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a...

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Detalles Bibliográficos
Autores principales: Barrios, Carlos Angulo, Canalejas-Tejero, Víctor
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190039/
https://www.ncbi.nlm.nih.gov/pubmed/30407439
http://dx.doi.org/10.3390/mi7040066

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190039/
https://www.ncbi.nlm.nih.gov/pubmed/30407439
http://dx.doi.org/10.3390/mi7040066

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