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Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation
We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a...
Autores principales: | Barrios, Carlos Angulo, Canalejas-Tejero, Víctor |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190039/ https://www.ncbi.nlm.nih.gov/pubmed/30407439 http://dx.doi.org/10.3390/mi7040066 |
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