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A Simple Extraction Method of Young’s Modulus for Multilayer Films in MEMS Applications
Based on the first resonance frequency measurement of multilayer beams, a simple extraction method has been developed to extract the Young’s modulus of individual layers. To verify this method, the double-layer cantilever, as a typical example, is analyzed to simplify the situation and finite elemen...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190058/ https://www.ncbi.nlm.nih.gov/pubmed/30400391 http://dx.doi.org/10.3390/mi8070201 |