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A Simple Extraction Method of Young’s Modulus for Multilayer Films in MEMS Applications

Based on the first resonance frequency measurement of multilayer beams, a simple extraction method has been developed to extract the Young’s modulus of individual layers. To verify this method, the double-layer cantilever, as a typical example, is analyzed to simplify the situation and finite elemen...

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Detalles Bibliográficos
Autores principales:	Guo, Xin-Ge, Zhou, Zai-Fa, Sun, Chao, Li, Wei-Hua, Huang, Qing-An
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190058/ https://www.ncbi.nlm.nih.gov/pubmed/30400391 http://dx.doi.org/10.3390/mi8070201

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