Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity

This work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical be...

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Detalles Bibliográficos
Autores principales: Eltagoury, Yomna M., Soliman, Mostafa, Sabry, Yasser M., Alotaibi, Mohammed J., Khalil, Diaa
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190082/
https://www.ncbi.nlm.nih.gov/pubmed/30404363
http://dx.doi.org/10.3390/mi7100188

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190082/
https://www.ncbi.nlm.nih.gov/pubmed/30404363
http://dx.doi.org/10.3390/mi7100188

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