Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning

An approach for fabricating sub-wavelength antireflective structures on SiC material is demonstrated. A time-efficient scalable nanopatterning method by rapid thermal annealing of thin metal film is applied followed by a dry etching process. Size-dependent optical properties of the antireflective Si...

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Detalles Bibliográficos
Autores principales: Ou, Yiyu, Fadil, Ahmed, Ou, Haiyan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190085/
https://www.ncbi.nlm.nih.gov/pubmed/30404323
http://dx.doi.org/10.3390/mi7090152

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190085/
https://www.ncbi.nlm.nih.gov/pubmed/30404323
http://dx.doi.org/10.3390/mi7090152

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