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Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning
An approach for fabricating sub-wavelength antireflective structures on SiC material is demonstrated. A time-efficient scalable nanopatterning method by rapid thermal annealing of thin metal film is applied followed by a dry etching process. Size-dependent optical properties of the antireflective Si...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190085/ https://www.ncbi.nlm.nih.gov/pubmed/30404323 http://dx.doi.org/10.3390/mi7090152 |
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author | Ou, Yiyu Fadil, Ahmed Ou, Haiyan |
author_facet | Ou, Yiyu Fadil, Ahmed Ou, Haiyan |
author_sort | Ou, Yiyu |
collection | PubMed |
description | An approach for fabricating sub-wavelength antireflective structures on SiC material is demonstrated. A time-efficient scalable nanopatterning method by rapid thermal annealing of thin metal film is applied followed by a dry etching process. Size-dependent optical properties of the antireflective SiC structures have been investigated. It is found that the surface reflection of SiC in the visible spectral range is significantly suppressed by applying the antireflective structures. Meanwhile, optical transmission and absorption could be tuned by modifying the feature size of the structure. It is believed that this effective fabrication method of antireflective structures could also be realized on other semiconductor materials or devices. |
format | Online Article Text |
id | pubmed-6190085 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-61900852018-11-01 Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning Ou, Yiyu Fadil, Ahmed Ou, Haiyan Micromachines (Basel) Article An approach for fabricating sub-wavelength antireflective structures on SiC material is demonstrated. A time-efficient scalable nanopatterning method by rapid thermal annealing of thin metal film is applied followed by a dry etching process. Size-dependent optical properties of the antireflective SiC structures have been investigated. It is found that the surface reflection of SiC in the visible spectral range is significantly suppressed by applying the antireflective structures. Meanwhile, optical transmission and absorption could be tuned by modifying the feature size of the structure. It is believed that this effective fabrication method of antireflective structures could also be realized on other semiconductor materials or devices. MDPI 2016-09-01 /pmc/articles/PMC6190085/ /pubmed/30404323 http://dx.doi.org/10.3390/mi7090152 Text en © 2016 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Ou, Yiyu Fadil, Ahmed Ou, Haiyan Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning |
title | Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning |
title_full | Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning |
title_fullStr | Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning |
title_full_unstemmed | Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning |
title_short | Antireflective SiC Surface Fabricated by Scalable Self-Assembled Nanopatterning |
title_sort | antireflective sic surface fabricated by scalable self-assembled nanopatterning |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190085/ https://www.ncbi.nlm.nih.gov/pubmed/30404323 http://dx.doi.org/10.3390/mi7090152 |
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