CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switc...

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Detalles Bibliográficos
Autores principales: Muñoz-Gamarra, Jose Luis, Uranga, Arantxa, Barniol, Nuria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190103/
https://www.ncbi.nlm.nih.gov/pubmed/30407403
http://dx.doi.org/10.3390/mi7020030

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190103/
https://www.ncbi.nlm.nih.gov/pubmed/30407403
http://dx.doi.org/10.3390/mi7020030

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