A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure

A capacitive coupling structure is developed to improve the performances of a capacitive complementary metal oxide semiconductor (CMOS) microelectromechanical system (MEMS) humidity sensor. The humidity sensor was fabricated by a post-CMOS process. Silver nanowires were dispersed onto the top of a c...

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Detalles Bibliográficos
Autores principales: Huang, Jian-Qiu, Li, Baoye, Chen, Wenhao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190121/
https://www.ncbi.nlm.nih.gov/pubmed/30404251
http://dx.doi.org/10.3390/mi7050074

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190121/
https://www.ncbi.nlm.nih.gov/pubmed/30404251
http://dx.doi.org/10.3390/mi7050074

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