Resonant Varifocal Micromirror with Piezoresistive Focus Sensor

This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to...

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Detalles Bibliográficos
Autores principales: Nakazawa, Kenta, Sasaki, Takashi, Furuta, Hiromasa, Kamiya, Jiro, Sasaki, Hideki, Kamiya, Toshikazu, Hane, Kazuhiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190170/
https://www.ncbi.nlm.nih.gov/pubmed/30407430
http://dx.doi.org/10.3390/mi7040057

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190170/
https://www.ncbi.nlm.nih.gov/pubmed/30407430
http://dx.doi.org/10.3390/mi7040057

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