3C-Silicon Carbide Microresonators for Timing and Frequency Reference

In the drive to miniaturise and integrate reference oscillator components, microelectromechanical systems (MEMS) resonators are excellent candidates to replace quartz crystals. Silicon is the most utilised resonator structural material due to its associated well-established fabrication processes. Ho...

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Detalles Bibliográficos
Autores principales: Wood, Graham S., Sviličić, Boris, Mastropaolo, Enrico, Cheung, Rebecca
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190194/
https://www.ncbi.nlm.nih.gov/pubmed/30404380
http://dx.doi.org/10.3390/mi7110208

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190194/
https://www.ncbi.nlm.nih.gov/pubmed/30404380
http://dx.doi.org/10.3390/mi7110208

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