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Love-Mode MEMS Devices for Sensing Applications in Liquids

Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were...

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Detalles Bibliográficos
Autores principales: Caliendo, Cinzia, Sait, Smail, Boubenider, Fouad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190195/
https://www.ncbi.nlm.nih.gov/pubmed/30407388
http://dx.doi.org/10.3390/mi7010015