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Love-Mode MEMS Devices for Sensing Applications in Liquids
Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190195/ https://www.ncbi.nlm.nih.gov/pubmed/30407388 http://dx.doi.org/10.3390/mi7010015 |