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Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU
A novel fully decoupled micro inertial measurement unit (MIMU) is presented in this paper. The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. Both the tri-axis gyroscope and tri-axis accelerometer structur...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190222/ https://www.ncbi.nlm.nih.gov/pubmed/30400499 http://dx.doi.org/10.3390/mi8100310 |