Two-Dimensional Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors with Differential Structure

A two-dimensional (2D) magnetic field sensor consisting of four silicon magnetic sensitive transistors (SMSTs) with similar characteristics is presented in this paper. By use of micro-electromechanical systems (MEMS) and integrated packaging technology, this sensor fabricated by using the silicon wa...

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Detalles Bibliográficos
Autores principales: Yang, Xianghong, Zhao, Xiaofeng, Bai, Yunjia, Lv, Meiwei, Wen, Dianzhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190269/
http://dx.doi.org/10.3390/mi8040095

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190269/
http://dx.doi.org/10.3390/mi8040095

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