Electrothermal Actuators for SiO(2) Photonic MEMS

This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 [Formula: see text]) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanic...

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Detalles Bibliográficos
Autores principales: Peters, Tjitte-Jelte, Tichem, Marcel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190276/
https://www.ncbi.nlm.nih.gov/pubmed/30404373
http://dx.doi.org/10.3390/mi7110200

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190276/
https://www.ncbi.nlm.nih.gov/pubmed/30404373
http://dx.doi.org/10.3390/mi7110200

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