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Electrothermal Actuators for SiO(2) Photonic MEMS
This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 [Formula: see text]) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanic...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190276/ https://www.ncbi.nlm.nih.gov/pubmed/30404373 http://dx.doi.org/10.3390/mi7110200 |