Reliability Design and Electro-Thermal-Optical Simulation of Bridge-Style Infrared Thermal Emitters

Designs and simulations of silicon-based micro-electromechanical systems (MEMS) infrared (IR) thermal emitters for gas sensing application are presented. The IR thermal emitter is designed as a bridge-style hotplate (BSH) structure suspended on a silicon frame for realizing a good thermal isolation...

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Detalles Bibliográficos
Autores principales: Zhou, Peng, Chen, Ranbin, Wang, Na, San, Haisheng, Chen, Xuyuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190287/
https://www.ncbi.nlm.nih.gov/pubmed/30404338
http://dx.doi.org/10.3390/mi7090166

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190287/
https://www.ncbi.nlm.nih.gov/pubmed/30404338
http://dx.doi.org/10.3390/mi7090166

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