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Reliability Design and Electro-Thermal-Optical Simulation of Bridge-Style Infrared Thermal Emitters
Designs and simulations of silicon-based micro-electromechanical systems (MEMS) infrared (IR) thermal emitters for gas sensing application are presented. The IR thermal emitter is designed as a bridge-style hotplate (BSH) structure suspended on a silicon frame for realizing a good thermal isolation...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190287/ https://www.ncbi.nlm.nih.gov/pubmed/30404338 http://dx.doi.org/10.3390/mi7090166 |