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Single-Capacitor Electret Impact Microgenerator
A new type of electrostatic microgenerator is presented that converts mechanical microvibrational energy into electric energy. The energy conversion mechanism is as follows. External microvibrations are transmitted to the device frame. The thin electret layer sputtered to the silicon substrate surfa...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190293/ https://www.ncbi.nlm.nih.gov/pubmed/30407380 http://dx.doi.org/10.3390/mi7010005 |