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Single-Capacitor Electret Impact Microgenerator

A new type of electrostatic microgenerator is presented that converts mechanical microvibrational energy into electric energy. The energy conversion mechanism is as follows. External microvibrations are transmitted to the device frame. The thin electret layer sputtered to the silicon substrate surfa...

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Detalles Bibliográficos
Autores principales: Baginsky, Igor, Kostsov, Edward, Sokolov, Alexey
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190293/
https://www.ncbi.nlm.nih.gov/pubmed/30407380
http://dx.doi.org/10.3390/mi7010005