Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges

This article presents the design, manufacture and testing of a capacitive pressure sensor with a high, tunable performance to low compressive loads (<10 kPa) and a resolution of less than 0.5 kPa. Such a performance is required for the monitoring of treatment efficacy delivered by compression gar...

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Detalles Bibliográficos
Autores principales: Mitrakos, Vasileios, Macintyre, Lisa, Denison, Fiona C., Hands, Philip J.W., Desmulliez, Marc P.Y.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190296/
http://dx.doi.org/10.3390/mi8020041

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190296/
http://dx.doi.org/10.3390/mi8020041

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